Funding
We acknowledge funding by the following agencies and projects.
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BMBF-project NanoScopeFutur-2D of the NanoMatFutur
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BMBFComplexity Scaling of Quantum Photonic Systems
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BMBF QuantumAktiv programme (Grant-ID: 13N15429)
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TAB-project Thüringer Research Group FastPhoton
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DFG CRC 1375 Nonlinear Optics down to Atomic scale
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DFG IRTG 2675 - Tailored metasurfaces (MetaActive)
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DLR Project QUICK3
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Max Planck School of Photonics