Nanooptical Systems for Polarimetry & Scatterometry

Nowadays virtually all properties of light can be controlled by nano-optical elements, such as plasmonic filters for wavelength selection, computer generated holograms (CGHs) for managing the propagation direction or wire grid polarizers and nano-optical wave plates for polarization control. Integrating these nano-optical elements with photo sensors arrays enables the realization of parallelized and strongly miniaturized optical systems. We use a patented process to encapsulate the structure, enabling the stacking of multiple structured layers. By splitting these elements in segments with different properties and orientations allows the realization of complex, miniaturized scatterometric systems.